Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12138732 | Polishing system apparatus and methods for defect reduction at a substrate edge | Sameer Deshpande | 2024-11-12 |
| 8758085 | Method for compensation of variability in chemical mechanical polishing consumables | Sivakumar Dhandapani, Charles C. Garretson, Gregory E. Menk, Stan Tsai | 2014-06-24 |