Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support pedestal

Substrate support pedestal

US Patent 6490145 · Granted Dec 3, 2002

Estimated economic value: $24,582,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Conformal yttrium oxide coating2025
Multilayer coatings of component parts for a work piece processing chamber2025
Ex situ coating of chamber components for semiconductor processing2025
Multilayer coating for corrosion resistance2025
Ex situ coating of chamber components for semiconductor processing2024
Polishing pads for high temperature processing2024
Low-temperature metal CMP for minimizing dishing and corrosion, and improving pa2024
Ex situ coating of chamber components for semiconductor processing2022
Systems and methods for copper (I) suppression in electrochemical deposition2021
Glass surface stress meter and multiple-tempered glass surface stress meter2021
Thin plastic polishing article for CMP applications2020
Ex situ coating of chamber components for semiconductor processing2020