Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8679979 | Using optical metrology for within wafer feed forward process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Zhize Zhu | 2014-03-25 |
| 8639377 | Metrology for GST film thickness and phase | Kun Xu, Feng Q. Liu, Yuchun Wang, Abraham Ravid | 2014-01-28 |
| 8586481 | Chemical planarization of copper wafer polishing | You Wang, Feng Q. Liu, Yuchun Wang, Lakshmanan Karuppiah, William H. McClintock +1 more | 2013-11-19 |
| 8579675 | Methods of using optical metrology for feed back and feed forward process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Zhize Zhu | 2013-11-12 |
| 8292693 | Using optical metrology for wafer to wafer feed back process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Zhize Zhu | 2012-10-23 |
| 8210900 | Dishing and defect control of chemical mechanical polishing using real-time adjustable additive delivery | You Wang, Yuchun Wang, Lakshmanan Karuppiah | 2012-07-03 |
| 8039397 | Using optical metrology for within wafer feed forward process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Zhize Zhu | 2011-10-18 |
| 7323416 | Method and composition for polishing a substrate | Feng Q. Liu, Tianbao Du, Alain Duboust, Yan Wang, Yongqi Hu +3 more | 2008-01-29 |
| 6872128 | System, method and apparatus for applying liquid to a CMP polishing pad | Xuyen Pham, Ren Zhou | 2005-03-29 |
| 6544887 | Polycide etch process | Win Chen | 2003-04-08 |
| 6372633 | Method and apparatus for forming metal interconnects | Dan Maydan, Ashok Sinha, Zheng Xu, Liang Chen, Roderick C. Mosely +3 more | 2002-04-16 |
| 6199927 | Robot blade for handling of semiconductor substrates | Behzad Shamlou, Xuyen Pham, Yu-Chia Chang, Daniel O. Clark, Shun Wu | 2001-03-13 |
| 6153530 | Post-etch treatment of plasma-etched feature surfaces to prevent corrosion | Yan Ye, Xiaoye Zhao, Chang-Lin Hsieh, Xian-Can Deng, Chung-Fu Chu +1 more | 2000-11-28 |
| 6024393 | Robot blade for handling of semiconductor substrate | Behzad Shamlou, Xuyen Pham, Yu-Chia Chang, Daniel O. Clark, Shun Wu | 2000-02-15 |