Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7479458 | Methods and apparatus for the optimization of highly selective process gases | Guang-Yaw Hwang, Thomas D. Nguyen, Timothy Tran, Yu-Wei Yang | 2009-01-20 |
| 6977184 | Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring | Shih-Yuan Cheng, Wayne Tu | 2005-12-20 |
| 6337277 | Clean chemistry low-k organic polymer etch | Rajinder Dhindsa, Ching-Hwa Chen | 2002-01-08 |
| 5904571 | Methods and apparatus for reducing charging during plasma processing | Roger Patrick, Phillip Jones, Kambiz Fallahpour, Yun-Yen Jack Yang | 1999-05-18 |