Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466502 | Line width roughness improvement with noble gas plasma | Shenjian Liu, Youn Gi Hong, Qian Fu | 2016-10-11 |
| 9263284 | Line width roughness improvement with noble gas plasma | Shenjian Liu, Youn Gi Hong, Qian Fu | 2016-02-16 |
| 8753804 | Line width roughness improvement with noble gas plasma | Shenjian Liu, Youn Gi Hong, Qian Fu | 2014-06-17 |
| 6977184 | Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring | Wen-Ben Chou, Wayne Tu | 2005-12-20 |