Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7344630 | Method and apparatus for electroplating small workpieces | Hsiue-Te Tu | 2008-03-18 |
| 6977184 | Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring | Wen-Ben Chou, Shih-Yuan Cheng | 2005-12-20 |