Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139791 | Showerhead faceplates with angled gas distribution passages for semiconductor processing tools | John Holland, Anthony de la Llera, Rajesh Dorai | 2024-11-12 |
| 10262834 | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly | Anthony de la Llera | 2019-04-16 |
| 9245716 | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly | Anthony de la Llera | 2016-01-26 |
| 8573152 | Showerhead electrode | Anthony de la Llera, Michael C. Kellogg, Rajinder Dhindsa | 2013-11-05 |
| 8470127 | Cam-locked showerhead electrode and assembly | Anthony de la Llera, Rajlnder Dhindsa, Michael C. Kellogg, Gregory R. Bettencourt, Roger Patrick | 2013-06-25 |
| 8419959 | Clamped monolithic showerhead electrode | Gregory R. Bettencourt, Gautam Bhattacharyya, Simon Gosselin Eng., Sandy Chao, Anthony de la Llera | 2013-04-16 |