| D814488 |
Display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool |
Vincent Wong, Ronald Ramnarine, Robert Housley, Mukesh Shah, Robert Ahrens |
2018-04-03 |
| D788134 |
Mobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool |
Vincent Wong, Ronald Ramnarine, Robert Housley, Mukesh Shah, Robert Ahrens |
2017-05-30 |
| 8536071 |
Gasket with positioning feature for clamped monolithic showerhead electrode |
Gregory R. Bettencourt, Gautam Bhattacharyya, Simon Gosselin |
2013-09-17 |
| 8419959 |
Clamped monolithic showerhead electrode |
Gregory R. Bettencourt, Gautam Bhattacharyya, Simon Gosselin Eng., Anthony de la Llera, Pratik Mankidy |
2013-04-16 |
| 8272346 |
Gasket with positioning feature for clamped monolithic showerhead electrode |
Gregory R. Bettencourt, Gautam Bhattacharyya, Simon Gosselin Eng |
2012-09-25 |
| 8084375 |
Hot edge ring with sloped upper surface |
Akira Koshiishi, Sathya Mani, Gautam Bhattacharyya, Gregory R. Bettencourt |
2011-12-27 |
| 7418978 |
Methods and apparatus for providing fluid to a semiconductor device processing apparatus |
Songjae Lee, Ho Seon Shin |
2008-09-02 |
| 7005046 |
Apparatus for electro chemical deposition |
Joseph Stevens, Yevgeniy Rabinovich, Mark Denome, Allen L. D'Ambra, Donald Olgado |
2006-02-28 |
| 6739958 |
Carrier head with a vibration reduction feature for a chemical mechanical polishing system |
Andrew J. Nagengast |
2004-05-25 |
| 6454927 |
Apparatus and method for electro chemical deposition |
Joseph Stevens, Yevgeniy Rabinovich, Mark Denome, Allen L. D'Ambra, Donald Olgado |
2002-09-24 |
| 6299753 |
Double pressure vessel chemical dispenser unit |
Mark Cassidy Cridlin Lloyd |
2001-10-09 |
