Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2015-07-28 |
| 8709202 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2014-04-22 |
| 8628268 | Cam lock electrode clamp | Michael C. Kellogg, Anthony de la Llera, Rajinder Dhindsa | 2014-01-14 |
| 7854820 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2010-12-21 |