Issued Patents All Time
Showing 26–50 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640905 | Plasma enhanced deposition of silicon-containing films at low temperature | Aykut Aydin, Rui Cheng | 2023-05-02 |
| 11618949 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Aykut Aydin, Diwakar Kedlaya | 2023-04-04 |
| 11562902 | Hydrogen management in plasma deposited films | Rui Cheng, Diwakar Kedlaya, Gautam K. Hemani, Krishna Nittala, Alicia J. Lustgraaf +4 more | 2023-01-24 |
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang +3 more | 2022-12-20 |
| 11527408 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-12-13 |
| 11462630 | Conformal halogen doping in 3D structures using conformal dopant film deposition | Rui Cheng, Yi Yang, Abhijit Basu Mallick | 2022-10-04 |
| 11456173 | Methods for modifying photoresist profiles and tuning critical dimensions | Meenakshi GUPTA, Rui Cheng, Srinivas Guggilla, Diwakar Kedlaya, Zubin Huang | 2022-09-27 |
| 11443919 | Film formation via pulsed RF plasma | Krishna Nittala, Diwakar Kedlaya, Yi Yang, Rui Cheng | 2022-09-13 |
| 11421324 | Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition | Jui-Yuan Hsu, Krishna Nittala, Pramit Manna | 2022-08-23 |
| 11335555 | Methods for conformal doping of three dimensional structures | Rui Cheng, Yi Yang | 2022-05-17 |
| 11315787 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-04-26 |
| 11170990 | Polysilicon liners | Krishna Nittala, Rui Cheng, Praket P. Jha, Jinrui GUO, Jingmei Liang | 2021-11-09 |
| 11017986 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon +1 more | 2021-05-25 |
| 10774423 | Tunable ground planes in plasma chambers | Thomas Nowak, Juan Carlos Rocha-Alvarez, Mark Fodor, Dale R. Du Bois, Amit Kumar BANSAL +4 more | 2020-09-15 |
| 10734265 | Semiconductor process equipment | Hari Ponnekanti, Juan Carlos Rocha, Mukund Srinivasan | 2020-08-04 |
| 10711347 | Micro-volume deposition chamber | Dale R. DuBois, Kien N. Chuc | 2020-07-14 |
| 10559465 | Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide | Rui Cheng, Yi Yang, Yihong Chen, Abhijit Basu Mallick | 2020-02-11 |
| 10518418 | Wafer swapper | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Sanjeev Baluja, Prajeeth Wilton | 2019-12-31 |
| 10483141 | Semiconductor process equipment | Hari Ponnekanti, Juan Carlos Rocha-Alvarez | 2019-11-19 |
| 10438860 | Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process | Amit Kumar BANSAL, Juan Carlos Rocha, Tuan Nguyen | 2019-10-08 |
| 10410869 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick +1 more | 2019-09-10 |
| 10240234 | Gas distribution apparatus for processing chambers | Dale R. Du Bois, Kien N. Chuc | 2019-03-26 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Abhijit Basu Mallick, Hari Ponnekanti, Mandyam Sriram, Alexandros T. Demos, Mukund Srinivasan +2 more | 2019-03-19 |
| 10094486 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2018-10-09 |
| 10056279 | Semiconductor process equipment | Hari Ponnekanti, Juan Carlos Rocha, Mukund Srinivasan | 2018-08-21 |