Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270748 | Method and apparatus for measuring particles | Amir A. Yasseri, Girish M. HUNDI, Duane Outka, John Daugherty, Cliff La Croix | 2025-04-08 |
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, John Daugherty, Pankaj HAZARIKA, Satish SRINIVASAN +5 more | 2025-03-11 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Nash W. ANDERSON, Tom Stevenson, John Daugherty +1 more | 2018-01-23 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, William Charles, John Daugherty, Sivakami Ramanathan +3 more | 2017-01-17 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill +5 more | 2016-05-10 |
| 9123651 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, William Charles, John Daugherty, Sivakami Ramanathan +3 more | 2015-09-01 |