| 9546432 |
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof |
Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more |
2017-01-17 |
| 9387521 |
Method of wet cleaning aluminum chamber parts |
Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang +2 more |
2016-07-12 |
| 9337002 |
Corrosion resistant aluminum coating on plasma chamber components |
John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill +5 more |
2016-05-10 |
| 9123651 |
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof |
Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more |
2015-09-01 |
| 8545639 |
Method of cleaning aluminum plasma chamber parts |
Hong Shih, John Daugherty, Dean J. Larson, Tuochuan Huang, Armen Avoyan +5 more |
2013-10-01 |
| 6905622 |
Electroless deposition method |
Deenesh Padhi, Joseph Yahalom, Chris McGuirk, Srinivas Gandikota, Girish Dixit |
2005-06-14 |
| 6899816 |
Electroless deposition method |
Deenesh Padhi, Joseph Yahalom, Chris McGuirk, Srinivas Gandikota, Girish Dixit |
2005-05-31 |
| 6878245 |
Method and apparatus for reducing organic depletion during non-processing time periods |
Srinivas Gandikota, Chris McGuirk, Deenesh Padhi, Muhammad Malik, Girish Dixit |
2005-04-12 |
| 6824666 |
Electroless deposition method over sub-micron apertures |
Srinivas Gandikota, Chris McGuirk, Deenesh Padhi, Muhammad Malik, Girish Dixit +1 more |
2004-11-30 |
| 6821909 |
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application |
Deenesh Padhi, Srinivas Gandikota, Girish Dixit |
2004-11-23 |
| 6797620 |
Method and apparatus for improved electroplating fill of an aperture |
John Lewis, Srinivas Gandikota, Girish Dixit, Robin Cheung, Fusen Chen |
2004-09-28 |
