Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2017-01-17 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang +2 more | 2016-07-12 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill +5 more | 2016-05-10 |
| 9123651 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2015-09-01 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, John Daugherty, Dean J. Larson, Tuochuan Huang, Armen Avoyan +5 more | 2013-10-01 |
| 6905622 | Electroless deposition method | Deenesh Padhi, Joseph Yahalom, Chris McGuirk, Srinivas Gandikota, Girish Dixit | 2005-06-14 |
| 6899816 | Electroless deposition method | Deenesh Padhi, Joseph Yahalom, Chris McGuirk, Srinivas Gandikota, Girish Dixit | 2005-05-31 |
| 6878245 | Method and apparatus for reducing organic depletion during non-processing time periods | Srinivas Gandikota, Chris McGuirk, Deenesh Padhi, Muhammad Malik, Girish Dixit | 2005-04-12 |
| 6824666 | Electroless deposition method over sub-micron apertures | Srinivas Gandikota, Chris McGuirk, Deenesh Padhi, Muhammad Malik, Girish Dixit +1 more | 2004-11-30 |
| 6821909 | Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application | Deenesh Padhi, Srinivas Gandikota, Girish Dixit | 2004-11-23 |
| 6797620 | Method and apparatus for improved electroplating fill of an aperture | John Lewis, Srinivas Gandikota, Girish Dixit, Robin Cheung, Fusen Chen | 2004-09-28 |