RV

Rajitha Vemuri

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #2,710,758 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10923379 Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure Chin-Yi Liu, Daniel Lai, Padma Gopalakrishnan 2021-02-16