Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923379 | Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure | Chin-Yi Liu, Daniel Lai, Padma Gopalakrishnan | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923379 | Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure | Chin-Yi Liu, Daniel Lai, Padma Gopalakrishnan | 2021-02-16 |