Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Surface annealing of components for substrate processing chambers

Surface annealing of components for substrate processing chambers

US Patent 9481608 · Granted Nov 1, 2016

Estimated economic value: $29,038,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Carrier head membrane with regions of different roughness2024
Method of making carrier head membrane with regions of different roughness2023
Printing chemical mechanical polishing pad having window or controlled porosity2021
Carrier head membrane with regions of different roughness2021
Methods for controlling clamping of insulator-type substrate on electrostatic-ty2021
Thermal radiation barrier for substrate processing chamber components2019
EMI/RF shielding of thermocouples2019
Carrier head membrane roughness to control polishing rate2018
Methods for bonding substrates2018
Printed chemical mechanical polishing pad having printed window2018
Life enhancement of ring assembly in semiconductor manufacturing chambers2018
Life enhancement of ring assembly in semiconductor manufacturing chambers2018