Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7700049 | Methods and apparatus for sensing characteristics of the contents of a process abatement reactor | Daniel O. Clark, Sebastien Raoux, Shaun W. Crawford | 2010-04-20 |
| 6423284 | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases | Jose Arno | 2002-07-23 |