Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400880 | Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber | Michael Philip Roberts, Douglas Walter Agnew, Daniel Boatright, Arun Anandhan Duraisamy, Joseph R. Abel +1 more | 2025-08-26 |
| 11021792 | Symmetric precursor delivery | Adrien LaVoie, Purushottam Kumar, Jeffrey Kersten, Gautam Dhar | 2021-06-01 |
| 10242848 | Carrier ring structure and chamber systems including the same | Nick Ray Linebarger, Jr., Sirish Reddy, Alice Hollister, Rungthiwa Methaapanon | 2019-03-26 |