Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431349 | In-situ control of film properties during atomic layer deposition | Joseph R. Abel, Ian John Curtin, Purushottam Kumar, Awnish Gupta | 2025-09-30 |
| 12417943 | Reducing intralevel capacitance in semiconductor devices | Joseph R. Abel, Bart J. van Schravendijk, Ian John Curtin, Dustin Zachary Austin, Awnish Gupta | 2025-09-16 |
| 12400880 | Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber | Eli Jeon, Michael Philip Roberts, Daniel Boatright, Arun Anandhan Duraisamy, Joseph R. Abel +1 more | 2025-08-26 |
| 12288685 | Modifying hydrophobicity of a wafer surface using an organosilicon precursor | Jeremy David Fields, Awnish Gupta, Joseph R. Abel, Purushottam Kumar | 2025-04-29 |
| 12252782 | In-situ PECVD cap layer | Jeremy David Fields, Ian John Curtin, Joseph R. Abel, Frank L. Pasquale | 2025-03-18 |
| 12157945 | Thermal atomic layer deposition of silicon-containing films | Awnish Gupta, Tengfei Miao, Adrien LaVoie, Ian John Curtin | 2024-12-03 |
| 12087574 | Oxidative conversion in atomic layer deposition processes | Joseph R. Abel, Bart J. van Schravendijk | 2024-09-10 |
| 12020923 | Low-κ ALD gap-fill methods and material | Joseph R. Abel, Adrien LaVoie, Ian John Curtin, Purushottam Kumar | 2024-06-25 |
| 10692717 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Ishtak Karim | 2020-06-23 |
| 10340136 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Ishtak Karim | 2019-07-02 |