Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417943 | Reducing intralevel capacitance in semiconductor devices | Joseph R. Abel, Bart J. van Schravendijk, Ian John Curtin, Douglas Walter Agnew, Awnish Gupta | 2025-09-16 |
| 12372872 | Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation | Andrew Xiao Liang, Nader Shamma, Rich Wise, Akhil Singhal, Arpan Mahorowala +1 more | 2025-07-29 |
| 11915923 | Method to clean SnO2 film from chamber | Akhil Singhal, Jeongseok Ha, Pei-Chi Liu | 2024-02-27 |
| 11717866 | Etching metal-oxide and protecting chamber components | Akhil Singhal, Alon Ganany, Daniel Boatright | 2023-08-08 |
| 11031244 | Modification of SNO2 surface for EUV lithography | Akhil Singhal, Nader Shamma | 2021-06-08 |
| 10840082 | Method to clean SnO2 film from chamber | Akhil Singhal, Jeongseok Ha, Pei-Chi Liu | 2020-11-17 |