Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400830 | RF sputtering of multiple electrodes with optimized plasma coupling through the implementation of capacitive and inductive components | Masahiro Watanabe, Sarah Graham Williams, Michael S. Thornton, Michael Meyer | 2025-08-26 |
| 9150960 | Methods and apparatus for sputtering using direct current | Hendrik Walde, David J. Christie, Bruce Fries | 2015-10-06 |
| 8133359 | Methods and apparatus for sputtering deposition using direct current | Hendrik Walde, David J. Christie, Bruce Fries | 2012-03-13 |