Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711335 | System and method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes | — | 2017-07-18 |
| 9673028 | Arc management with voltage reversal and improved recovery | Hendrik Walde, Joshua Brian Pankratz, Brian D. Kowal | 2017-06-06 |
| 9313870 | Arc management with voltage reversal and improved recovery | Hendrik Walde, Joshua Brian Pankratz, Brian D. Kowal | 2016-04-12 |
| 9150960 | Methods and apparatus for sputtering using direct current | Ken Nauman, Hendrik Walde, Bruce Fries | 2015-10-06 |
| 9129776 | Differing boost voltages applied to two or more anodeless electrodes for plasma processing | Kenneth W. Finley | 2015-09-08 |
| 8133359 | Methods and apparatus for sputtering deposition using direct current | Ken Nauman, Hendrik Walde, Bruce Fries | 2012-03-13 |
| 7105075 | DC power supply utilizing real time estimation of dynamic impedance | Milan Ilic, Kalyan Siddabattula, Gerald C. Roop, Jr. | 2006-09-12 |
| 6808607 | High peak power plasma pulsed supply with arc handling | — | 2004-10-26 |
| 6532161 | Power supply with flux-controlled transformer | Dmitri Kovalevskii, Michael Kishinevsky | 2003-03-11 |
| 6222321 | Plasma generator pulsed direct current supply in a bridge configuration | Richard A. Scholl | 2001-04-24 |
| 5917286 | Pulsed direct current power supply configurations for generating plasmas | Richard A. Scholl | 1999-06-29 |
| 5049836 | High voltage electrical amplifier having a short rise time | Gregory E. Dallum | 1991-09-17 |