Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424410 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Ying Wu, Alex Paterson | 2025-09-23 |
| 12397435 | Substrate location detection and adjustment | Michael J. Martin, Alexander Paterson | 2025-08-26 |
| 12261029 | Protection system for switches in direct drive circuits of substrate processing systems | Maolin Long, Michael J. Martin, Alexander Paterson | 2025-03-25 |
| 12193138 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2025-01-07 |
| 12165841 | Dual-frequency, direct-drive inductively coupled plasma source | Maolin Long, Alexander Paterson | 2024-12-10 |
| 11728136 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Ying Wu, Alex Paterson | 2023-08-15 |
| 11728137 | Direct frequency tuning for matchless plasma source in substrate processing systems | Maolin Long, Ying Wu, Alexander Paterson | 2023-08-15 |
| 11716805 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2023-08-01 |
| 11437219 | Frequency tuning for a matchless plasma source | Maolin Long, Ying Wu, Alex Paterson | 2022-09-06 |
| 11342159 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Ying Wu, Alex Paterson | 2022-05-24 |
| 11224116 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2022-01-11 |
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Michael J. Martin, Jon McChesney, Alexander Paterson | 2021-03-23 |
| 10879044 | Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing | Arthur H. Sato, Ying Wu, Alexander Paterson | 2020-12-29 |
| 10672590 | Frequency tuning for a matchless plasma source | Maolin Long, Ying Wu, Alex Paterson | 2020-06-02 |
| 10638593 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2020-04-28 |
| 10264663 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2019-04-16 |