| 12424410 |
RF pulsing within pulsing for semiconductor RF plasma processing |
Maolin Long, Ying Wu, Alex Paterson |
2025-09-23 |
| 12397435 |
Substrate location detection and adjustment |
Michael J. Martin, Alexander Paterson |
2025-08-26 |
| 12261029 |
Protection system for switches in direct drive circuits of substrate processing systems |
Maolin Long, Michael J. Martin, Alexander Paterson |
2025-03-25 |
| 12193138 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Ricky Marsh, Alex Paterson |
2025-01-07 |
| 12165841 |
Dual-frequency, direct-drive inductively coupled plasma source |
Maolin Long, Alexander Paterson |
2024-12-10 |
| 11728136 |
RF pulsing within pulsing for semiconductor RF plasma processing |
Maolin Long, Ying Wu, Alex Paterson |
2023-08-15 |
| 11728137 |
Direct frequency tuning for matchless plasma source in substrate processing systems |
Maolin Long, Ying Wu, Alexander Paterson |
2023-08-15 |
| 11716805 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Ricky Marsh, Alex Paterson |
2023-08-01 |
| 11437219 |
Frequency tuning for a matchless plasma source |
Maolin Long, Ying Wu, Alex Paterson |
2022-09-06 |
| 11342159 |
RF pulsing within pulsing for semiconductor RF plasma processing |
Maolin Long, Ying Wu, Alex Paterson |
2022-05-24 |
| 11224116 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Ricky Marsh, Alex Paterson |
2022-01-11 |
| 10957521 |
Image based plasma sheath profile detection on plasma processing tools |
Michael J. Martin, Jon McChesney, Alexander Paterson |
2021-03-23 |
| 10879044 |
Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing |
Arthur H. Sato, Ying Wu, Alexander Paterson |
2020-12-29 |
| 10672590 |
Frequency tuning for a matchless plasma source |
Maolin Long, Ying Wu, Alex Paterson |
2020-06-02 |
| 10638593 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Ricky Marsh, Alex Paterson |
2020-04-28 |
| 10264663 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Ricky Marsh, Alex Paterson |
2019-04-16 |
