Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12193138 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Alex Paterson | 2025-01-07 |
| 11716805 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Alex Paterson | 2023-08-01 |
| 11224116 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Alex Paterson | 2022-01-11 |
| 10638593 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Alex Paterson | 2020-04-28 |
| 10264663 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Alex Paterson | 2019-04-16 |
| 10056231 | TCCT match circuit for plasma etch chambers | Maolin Long, Alex Paterson | 2018-08-21 |
| 9978565 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Alex Paterson, John Holland | 2018-05-22 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Maolin Long, Alex Paterson, Ying Wu, John Drewery | 2016-03-22 |
| 9059678 | TCCT match circuit for plasma etch chambers | Maolin Long, Alex Paterson | 2015-06-16 |
| 6553853 | Plasma probe and method for making same | Stanley C. Siu | 2003-04-29 |
| 6357308 | Plasma probe and method for making same | Stanley C. Siu | 2002-03-19 |
| 5933314 | Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks | Albert M. Lambson, Rick Caple, Eric H. Lenz, Laura M. Braun | 1999-08-03 |
| D405443 | Aircraft personal video monitor | — | 1999-02-09 |