Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5933314 | Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks | Albert M. Lambson, Eric H. Lenz, Laura M. Braun, Ricky Marsh | 1999-08-03 |