Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679751 | Chamber filler kit for plasma etch chamber useful for fast gas switching | Theo Panagopoulos, Alex Paterson, Craig Blair | 2017-06-13 |
| 9530656 | Temperature control in RF chamber with heater and air amplifier | Alex Paterson | 2016-12-27 |
| 9082805 | System and method for testing an electrostatic chuck | Hong Shih, Saurabh Ullal, Tuochuan Huang, Yan Fang | 2015-07-14 |
| 8522716 | Protective coating for a plasma processing chamber part and a method of use | Bobby Kadkhodayan, Eric A. Pape, Rajinder Dhindsa | 2013-09-03 |
| 8143904 | System and method for testing an electrostatic chuck | Hong Shih, Saurabh Ullal, Tuochuan Huang, Yan Fang | 2012-03-27 |
| 6962644 | Tandem etch chamber plasma processing system | Alexander Paterson, Valentin Todorov, Gerhard Schneider, David Palagashvili, John Holland +1 more | 2005-11-08 |
| 6727655 | Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber | Alex Paterson, Valentin N. Todorow, John Holland, Michael Barnes | 2004-04-27 |
| 6494958 | Plasma chamber support with coupled electrode | Shamouil Shamouilian, Kwok Manus Wong, Liang Wang, Alexander Veytser, Dennis S. Grimard | 2002-12-17 |