Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output

Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output

US Patent 9435692 · Granted Sep 6, 2016

Estimated economic value: $18,727,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Matched tcr joule heater designs for electrostatic chucks2025
Single crystal metal oxide plasma chamber component2025
Permanent secondary erosion containment for electrostatic chuck bonds2024
Method for conditioning a plasma processing chamber2024
Edge ring arrangement with moveable edge rings2024
Determining and controlling substrate temperature during substrate processing2024
Reflectometer to monitor substrate movement2023
Two-stage pin lifter for de-chuck operations2022
Method for conditioning a ceramic coating2022
Method for assembling an adjustable automotive luminous device2022
Ceramic baseplate with channels having non-square corners2021
Substrate holder having integrated temperature measurement electrical devices2021