Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Two-stage pin lifter for de-chuck operations

Two-stage pin lifter for de-chuck operations

US Patent 11430688 · Granted Aug 30, 2022

Estimated economic value: $159,836,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Matched tcr joule heater designs for electrostatic chucks2025
RF immune sensor probe for monitoring a temperature of an electrostatic chuck of2025
Single crystal metal oxide plasma chamber component2025
Long-life extended temperature range embedded diode design for electrostatic chu2024
Connector for substrate support with embedded temperature sensors2024
Permanent secondary erosion containment for electrostatic chuck bonds2024
Method for conditioning a plasma processing chamber2024
Determining and controlling substrate temperature during substrate processing2024
Long-life extended temperature range embedded diode design for electrostatic chu2024
Reflectometer to monitor substrate movement2023
Reflectometer to monitor substrate movement2023
Method for conditioning a ceramic coating2022