Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array

Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array

US Patent 12154814 · Granted Nov 26, 2024

Estimated economic value: $766,350,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

RF immune sensor probe for monitoring a temperature of an electrostatic chuck of2025
Connector for substrate support with embedded temperature sensors2024
Long-life extended temperature range embedded diode design for electrostatic chu2024
Reflectometer to monitor substrate movement2023
Two-stage pin lifter for de-chuck operations2022
Magnetic levitation bearing, magnetic levitation rotor support assembly, and com2022
Wiring structure of magnetic suspension bearing, compressor and air conditioner2021
Long-life high-power terminals for substrate support with embedded heating eleme2021
Connector for substrate support with embedded temperature sensors2020
Stator assembly of a magnetic suspension bearing and manufacturing method2020
Magnetic levitation bearing assembly and compressor2020
Protective structure for magnetic bearing and magnetic bearing assembly2020