Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Long-life high-power terminals for substrate support with embedded heating elements

Long-life high-power terminals for substrate support with embedded heating elements

US Patent 10957520 · Granted Mar 23, 2021

Estimated economic value: $164,801,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

RF immune sensor probe for monitoring a temperature of an electrostatic chuck of2025
Long-life extended temperature range embedded diode design for electrostatic chu2024
Connector for substrate support with embedded temperature sensors2024
Long-life extended temperature range embedded diode design for electrostatic chu2024
Reflectometer to monitor substrate movement2023
Two-stage pin lifter for de-chuck operations2022
Magnetic levitation bearing, magnetic levitation rotor support assembly, and com2022
Wiring structure of magnetic suspension bearing, compressor and air conditioner2021
Connector for substrate support with embedded temperature sensors2020
Stator assembly of a magnetic suspension bearing and manufacturing method2020
Magnetic levitation bearing assembly and compressor2020
Protective structure for magnetic bearing and magnetic bearing assembly2020