Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ceramic baseplate with channels having non-square corners

Ceramic baseplate with channels having non-square corners

US Patent 11133211 · Granted Sep 28, 2021

Estimated economic value: $224,536,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Matched tcr joule heater designs for electrostatic chucks2025
Coolant channel with internal fins for substrate processing pedestals2025
Single crystal metal oxide plasma chamber component2025
Permanent secondary erosion containment for electrostatic chuck bonds2024
Method for conditioning a plasma processing chamber2024
Determining and controlling substrate temperature during substrate processing2024
Electrostatic chuck with ceramic monolithic body2024
Electrostatically clamped edge ring2024
Multi-plate electrostatic chucks with ceramic baseplates2023
Reflectometer to monitor substrate movement2023
Connection assembly for audio equipment2022
Two-stage pin lifter for de-chuck operations2022