Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck with ceramic monolithic body

Electrostatic chuck with ceramic monolithic body

US Patent 11967517 · Granted Apr 23, 2024

Estimated economic value: $407,659,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Edge rings providing kinematic coupling and corresponding substrate processing s2025
Multi-plate electrostatic chucks with ceramic baseplates2025
Multi-plate electrostatic chucks with ceramic baseplates2025
Electrostatic chuck heater resistance measurement to approximate temperature2025
Coolant channel with internal fins for substrate processing pedestals2025
Coolant channel with internal fins for substrate processing pedestals2025
Edge seal for lower electrode assembly2025
Electrostatic edge ring mounting system for substrate processing2025
Substrate support with varying depths of areas between mesas and corresponding t2025
Method for conditioning semiconductor processing chamber components2024
Chuck for plasma processing chamber2024
Electrostatically clamped edge ring2024