Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227840 | Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating | Keith Gaff, Devin Ramdutt | 2025-02-18 |
| 12131890 | Chuck for plasma processing chamber | Darrell Ehrlich | 2024-10-29 |