Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381105 | Coolant channel with internal fins for substrate processing pedestals | Feng Wang, Alexander Matyushkin, Darrell Ehrlich | 2025-08-05 |
| 10741429 | Model-based control of substrate processing systems | Tao Zhang, Kai Liu | 2020-08-11 |