Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holder having integrated temperature measurement electrical devices

Substrate holder having integrated temperature measurement electrical devices

US Patent 10186437 · Granted Jan 22, 2019

Estimated economic value: $50,002,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Edge rings providing kinematic coupling and corresponding substrate processing s2025
Matched tcr joule heater designs for electrostatic chucks2025
Coolant channel with internal fins for substrate processing pedestals2025
Electrostatic edge ring mounting system for substrate processing2025
Single crystal metal oxide plasma chamber component2025
Chuck for plasma processing chamber2024
Permanent secondary erosion containment for electrostatic chuck bonds2024
Method for conditioning a plasma processing chamber2024
Determining and controlling substrate temperature during substrate processing2024
Electrostatic chuck with ceramic monolithic body2024
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning inc2023
Reflectometer to monitor substrate movement2023