Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7567700 | Dynamic metrology sampling with wafer uniformity control | Merritt Funk, Daniel Prager, Wesley C. Natzle | 2009-07-28 |
| 7502709 | Dynamic metrology sampling for a dual damascene process | Merritt Funk, Daniel Prager, Wesley C. Natzle | 2009-03-10 |
| 7477960 | Fault detection and classification (FDC) using a run-to-run controller | James E. Willis, Merritt Funk, Kevin Lally, Kevin Pinto, Masayuki Tomoyasu +1 more | 2009-01-13 |
| 7324193 | Measuring a damaged structure formed on a wafer using optical metrology | Kevin Lally, Merritt Funk | 2008-01-29 |