Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7505879 | Method for generating multivariate analysis model expression for processing apparatus, method for executing multivariate analysis of processing apparatus, control device of processing apparatus and control system for processing apparatus | Masayuki Tomoyasu, Hideki Tanaka | 2009-03-17 |
| 7101458 | Plasma processing method and apparatus | Yuichi Mimura | 2006-09-05 |
| 6985215 | Plasma processing method and plasma processing apparatus | Hideaki Sato, Naoki Takayama, Hisanori SAKAI, Yuichi Mimura | 2006-01-10 |