Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978322 | Transfer device, substrate processing apparatus, and transfer method | Ao ZHENG, Moriyoshi Kinoshita | 2021-04-13 |
| 10473399 | Connection structure, magnetic annealing device using same, and connecting method | Ian Colgan, George Eyres, Ioan Domsa, Junichi Sato, Tomoaki Abe | 2019-11-12 |
| 9939200 | Substrate transfer system and heat treatment apparatus using same | Kyoko Ikeda | 2018-04-10 |
| 7059849 | Heat treatment system and a method for cooling a loading chamber | Kazunari Sakata, Keiichi Katabuchi, Shingo Watanabe, Shinya Mochizuki, Motoki Akimoto +1 more | 2006-06-13 |