KK

Keiichi Katabuchi

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,419,638 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7059849 Heat treatment system and a method for cooling a loading chamber Kazunari Sakata, Koyu Hasegawa, Shingo Watanabe, Shinya Mochizuki, Motoki Akimoto +1 more 2006-06-13