Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367642 | Substrate processing apparatus and purging method | Yuji Sasaki, Junichi Sato, Takashi Asakawa | 2022-06-21 |
| 10978322 | Transfer device, substrate processing apparatus, and transfer method | Ao ZHENG, Koyu Hasegawa | 2021-04-13 |
| 10529608 | Substrate processing apparatus and substrate processing method | Hiroshi Kumada, Hiroyuki Matsuyoshi | 2020-01-07 |