Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12188125 | Showerhead and substrate processing apparatus | Takanobu HOTTA, Takuya KAWAGUCHI, Hideaki Yamasaki, Toshio Takagi | 2025-01-07 |
| 11306847 | Valve device, processing apparatus, and control method | Tomohisa KIMOTO, Yuichi FURUYA, Eiichi KOMORI, Hideaki Fujita, Hiroyuki Mori | 2022-04-19 |
| 10156014 | Gas treatment apparatus and gas treatment method | Yuichi FURUYA, Daisuke Toriya | 2018-12-18 |
| 8133323 | Film forming apparatus and method, gas supply device and storage medium | — | 2012-03-13 |
| 8128751 | Film-forming apparatus | Shigeru Kasai | 2012-03-06 |
| 7661386 | Film forming device | Shigeru Kasai | 2010-02-16 |