Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288678 | Substrate processing apparatus and substrate transfer position adjustment method | Hidehiko Sato, Hiroshi Nagahata, Yuri Kimura | 2025-04-29 |
| 12033838 | Plasma processing apparatus and wear amount measurement method | Ryuta Akimoto, Takehito Watanabe | 2024-07-09 |
| 11705374 | Substrate processing method and substrate processing apparatus | Hidehiko Sato, Tomoyuki Kudoh, Hiroaki Mochizuki | 2023-07-18 |
| 11682543 | Plasma processing method and plasma processing apparatus | — | 2023-06-20 |
| 11404249 | Substrate processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Takanori BANSE, Rumiko MORIYA | 2022-08-02 |
| 11145490 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Shinya Morikita, Naohiko Okunishi | 2021-10-12 |
| 10546723 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Shinya Morikita, Naohiko Okunishi | 2020-01-28 |