Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404249 | Substrate processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Takanori BANSE, Joji TAKAYOSHI | 2022-08-02 |
| 10825662 | Method for driving member and processing apparatus | Takanori BANSE, Suguru Sato, Yuuji AKIDUKI, Takehiro Tanikawa | 2020-11-03 |