Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431335 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Shinya Ishikawa | 2025-09-30 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Shinya Ishikawa +4 more | 2024-10-08 |
| 12100578 | Substrate processing method | Sho Kumakura | 2024-09-24 |
| 11476123 | Etching method, plasma processing apparatus, and substrate processing system | Takayuki Katsunuma, Masanobu Honda, Shinya Ishikawa | 2022-10-18 |