Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Yuta NAKANE, Shinya Ishikawa +4 more | 2024-10-08 |
| 11961746 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Yoshihide Kihara | 2024-04-16 |
| 11862441 | Plasma processing method and plasma processing apparatus | Sho Kumakura | 2024-01-02 |
| 11810791 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA | 2023-11-07 |
| 11728166 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Yoshihide Kihara | 2023-08-15 |
| 11450537 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Yoshihide Kihara | 2022-09-20 |
| 11380555 | Etching method and etching apparatus | Maju TOMURA, Sho Kumakura, Yoshihide Kihara | 2022-07-05 |
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Toru Hisamatsu, Maju TOMURA, Sho Kumakura | 2021-02-09 |