Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430679 | Semiconductor manufacturing apparatus | Kwangnam Kim, Nohsung Kwak, Sungyeon KIM, Hyungjun Kim, Haejoong Park +3 more | 2022-08-30 |
| 10643858 | Method of etching substrate | Eunwoo Lee, Jungmo Sung, Jongwoo Sun | 2020-05-05 |