Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384433 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Minkyu SUNG, Sung-Ki Lee, Dougyong Sung, Sang Ho Lee | 2022-07-12 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Dougyong Sung, Jongwoo Sun, Minkyu SUNG, Kimoon Jung, Seongha JEONG +2 more | 2022-02-15 |
| 10934621 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Minkyu SUNG, Sung-Ki Lee, Dougyong Sung, Sang Ho Lee | 2021-03-02 |
| 9847266 | Method of fabricating semiconductor device | Tae Hwa Kim, Chanhoon Park, Dongsoo Lee, Jaehyun Lee, Hyung Joo Lee +1 more | 2017-12-19 |
| 9355857 | Substrate manufacturing method and substrate manufacturing apparatus | Kyung-Sun Kim, Dougyong Sung, Tae Hwa Kim, Heungsik PARK, Jung Min Kim | 2016-05-31 |