Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589771 | Plasma processing apparatus | Yuki Hosaka, Naokazu Furuya | 2017-03-07 |
| 9076636 | Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method | Hidetoshi Kimura, Kiyoshi Maeda, Jun Hirose, Tsuyoshi Hida | 2015-07-07 |
| 9011635 | Plasma processing apparatus | Yuki Hosaka, Naokazu Furuya | 2015-04-21 |
| 8084720 | High rate method for stable temperature control of a substrate | — | 2011-12-27 |
| 7893387 | High rate method for stable temperature control of a substrate | — | 2011-02-22 |
| 7557328 | High rate method for stable temperature control of a substrate | — | 2009-07-07 |