Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942357 | Workpiece placement apparatus and processing apparatus | Yohei Uchida, Naoki Sugawa, Katsushi Abe | 2024-03-26 |
| 11410871 | Workpiece placement apparatus and processing apparatus | Yohei Uchida, Naoki Sugawa, Katsushi Abe | 2022-08-09 |
| 10020172 | Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method | Mitsunori Ohata, Hidetoshi Kimura, Kiyoshi Maeda, Jun Hirose | 2018-07-10 |
| 9076636 | Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method | Mitsunori Ohata, Hidetoshi Kimura, Kiyoshi Maeda, Jun Hirose | 2015-07-07 |
| 8776356 | Electrostatic chuck and manufacturing method thereof | Takashi Yamamoto | 2014-07-15 |
| 8517392 | Electrostatic chuck and manufacturing method thereof | Takashi Yamamoto | 2013-08-27 |
| 6199582 | Flow control valve | Hironori Matsuzawa, Kimihito Sasao | 2001-03-13 |