Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340975 | Plasma processing apparatus | Takehisa Saito, Naoki Fujiwara | 2025-06-24 |
| 11935731 | Plasma processing apparatus, plasma state detection method, and plasma state detection program | Daisuke Hayashi, Shinsuke Oka | 2024-03-19 |
| 11804366 | Plasma processing apparatus | Yuki Hosaka, Toshiki Nakajima | 2023-10-31 |
| 11348768 | Plasma processing apparatus | Yuki Hosaka, Toshiki Nakajima, Mayo UDA | 2022-05-31 |
| 11101114 | Plasma processing apparatus | Yuki Hosaka, Toshiki Nakajima | 2021-08-24 |
| 10950467 | Gas supply mechanism and semiconductor manufacturing system | Yuki Hosaka, Toshiki Nakajima, Mayo UDA, Kenichi Shimono | 2021-03-16 |
| 10685816 | Method of etching object to be processed | Jun Sato, Kiyoshi Maeda, Mitsunori Ohata, Kazuya Matsumoto | 2020-06-16 |
| 10510514 | Gas supply mechanism and semiconductor manufacturing apparatus | Yuki Hosaka, Mayo UDA, Takashi Kubo | 2019-12-17 |
| 10204766 | Ion beam irradiation apparatus and substrate processing apparatus | Mitsunori Ohata, Shinji Nagamachi, Kenichi Shimono | 2019-02-12 |
| 10192774 | Temperature control device for processing target object and method of selectively etching nitride film from multilayer film | Yuki Hosaka, Toshiki Nakajima, Koichi Nagakura | 2019-01-29 |
| 5753568 | Moisture-permeable, waterproof fabric and its production process | Yasunao Shimano, Masashi Mukai, Hideki Chatani, Kazuhiko Takashima, Dai Hara | 1998-05-19 |
| 5626950 | Moisture permeable, waterproof fabric and its production process | Yasunao Shimano, Masashi Mukai, Hideki Chatani, Kazuhiko Takashima, Dai Hara | 1997-05-06 |
| 4857001 | Electrical connectors for leadless circuit boards | Kenichi Nakano, Tetsuro Tokaichi, Yoshiaki Ichimura, Natsuki Kawabe | 1989-08-15 |