Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832373 | Plasma processing apparatus | Yohei Yamazawa, Takehisa Saito, Keigo Toyoda, Alok Ranjan, Toshiki Nakajima | 2023-11-28 |
| 11562889 | Plasma processing apparatus and gas introducing method | Manabu Tsuruta, Keigo Toyoda | 2023-01-24 |
| 11470712 | Plasma processing apparatus | Yohei Yamazawa, Takehisa Saito, Keigo Toyoda, Alok Ranjan, Toshiki Nakajima | 2022-10-11 |
| 11348768 | Plasma processing apparatus | Yuki Hosaka, Yoshihiro Umezawa, Toshiki Nakajima | 2022-05-31 |
| 10950467 | Gas supply mechanism and semiconductor manufacturing system | Yuki Hosaka, Yoshihiro Umezawa, Toshiki Nakajima, Kenichi Shimono | 2021-03-16 |
| 10510514 | Gas supply mechanism and semiconductor manufacturing apparatus | Yuki Hosaka, Yoshihiro Umezawa, Takashi Kubo | 2019-12-17 |