Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985029 | Substrate processing apparatus and substrate processing method | Hiroyuki Ogawa, Akitaka Shimizu | 2021-04-20 |
| 10541145 | Substrate processing apparatus and substrate processing method | Hiroyuki Ogawa, Akitaka Shimizu | 2020-01-21 |
| 8124539 | Plasma processing apparatus, focus ring, and susceptor | Shosuke Endoh, Noriyuki Iwabuchi, Shigeaki Kato, Jun Hirose, Koichi Nagakura +2 more | 2012-02-28 |
| 7231321 | Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus | Hajime Furuya, Hideki Tanaka, Ryoko Kobayashi | 2007-06-12 |